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Effect of Ion- Beam Milling on Lips Prior to Lift-Off Process

Author(s):
Bhan, R.K.
Mittal, V.
Rawal, D.S.
Naik, A.A.
Sehgal, B.K.
Singh, K.P.
Singh, B.V.
Aneja, B.R.
Sharma, B.L.
Singh, R.
Gopal, V.
6 more
Publication title:
Proceedings of the Eleventh International Workshop on the Physics of Semiconductor Devices : (December 11-15, 2001)
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4746
Pub. Year:
2002
Vol.:
VOL-2
Page(from):
1049
Page(to):
1052
Pages:
4
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819445001 [0819445002]
Language:
English
Call no.:
P63600/4746
Type:
Conference Proceedings

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