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Improved design of piezoelectric microactuators for HDD

Author(s):
Publication title:
Smart structures, devices, and systems : 16-18 December 2002 Melbourne, Australia
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4935
Pub. Year:
2002
Page(from):
113
Page(to):
119
Pages:
7
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819447302 [0819447307]
Language:
English
Call no.:
P63600/4935
Type:
Conference Proceedings

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