Promise and challenge of DUV speckle interferometry
- Author(s):
- Aswendt, P. ( Fraunhofer-Institut fuer Werkzeugmaschinen und Umformtechnik (Germany) )
- Publication title:
- Speckle metrology 2003 : 18-20 June 2003, Trondheim, Norway
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4933
- Pub. Year:
- 2003
- Page(from):
- 117
- Page(to):
- 122
- Pages:
- 6
- Pub. info.:
- Bellingham, Wash: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819447289 [0819447285]
- Language:
- English
- Call no.:
- P63600/4933
- Type:
- Conference Proceedings
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