Blank Cover Image

Laser-Assisted Selective Bonding for Wafer-Level & Chip-Scale Vacuum Packaging of MEMS and Related Micro Systems

Author(s):
Publication title:
Proceedings : 2002 International Symposium on Microelectronics : September 4-6, 2002, Colorado Convention Center, Denver, CO
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4931
Pub. Year:
2002
Page(from):
93
Page(to):
98
Pages:
6
Pub. info.:
Washington, DC: IMAPS
ISSN:
0277786X
ISBN:
9780930815660 [0930815661]
Language:
English
Call no.:
P63600/4931
Type:
Conference Proceedings

Similar Items:

Malshe,A.P., O'Neal,C.B., Singh,S., Brown,W.D.

SPIE-The International Society for Optical Engineering

Lostetter, A.B., Olejniczak, K.J., Malshe, A.P., Brown, W.D., Elshabini, Aicha

IMAPS

Young,Jedediah, Malshe,Ajay P., Brown,W.D., Lenihan,Timothy, Albert,Douglas, Ozguz,Volkan

SPIE-The International Society for Optical Engineering

Spencer, Daryl, Malshe, Ajay P., Foster, Ronald B., O'Neal, Chad B.

SPIE-The International Society for Optical Engineering

Malshe,Ajay P., Shingh,Sushila, Hankins,Keith, Young,Jedediah J., Park,B.S., Yedave,S.N., Brown,W.D.

IMAPS

Malshe,Ajay P., Morrison,W.B., Railkar,T.A., Brown,W.D., Lenihan,T.G.

IMAPS

Dhamdhere, Ajit R., Malshe, Ajay P., Yedave, S.N., Schimidt, W.F., Brown, W.D., Morales, John

IMAPS

Ajay P. Malshe, J.G. Glezen, H.A. Naseem, W.D. Brown, L.W. Schaper

Society of Photo-optical Instrumentation Engineers

Chen, S., Ma, H., Chen, M., Xiong, T., Liu, S., Yi, X.

SPIE - The International Society of Optical Engineering

Helsel,M.P., Barger,J.D., Wine,D.W., Osborn,T.D.

SPIE-The International Society for Optical Engineering

Weiss,D., Teomim,D., Badihi,A.P., Zilber,G.

SPIE-The International Society for Optical Engineering

Lu, J.-Q., Jindal, A., Kwon, Y., McMahon, J.J., Lee, K.-W., Kraft, R.P., Altemus, B., Cheng, D., Eisenbraun, E., Cale, …

Electrochemical Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12