Capacitive rf MEMS switch with composite beam
- Author(s):
- Miao, M. ( Peking Univ. (China) )
- Xiao, Z.Y.
- Wu, G.Y.
- Hao, Y.L.
- Zhang, H.X.
- Publication title:
- MEMS/MOEMS Technologies and Applications
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4928
- Pub. Year:
- 2002
- Page(from):
- 248
- Page(to):
- 255
- Pages:
- 8
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819447173 [081944717X]
- Language:
- English
- Call no.:
- P63600/4928
- Type:
- Conference Proceedings
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