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Microstructures of PMMA sheet fabricated by RIE

Author(s):
Publication title:
MEMS/MOEMS Technologies and Applications
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4928
Pub. Year:
2002
Page(from):
209
Page(to):
214
Pages:
6
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819447173 [081944717X]
Language:
English
Call no.:
P63600/4928
Type:
Conference Proceedings

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