Optimum design of levitating coil and stability coils in the micromachined gyroscope of electromagnetic levitated rotor

Optimum design of levitating coil and stability coils in the micromachined gyroscope of electromagnetic levitated rotor

Author(s):

Wu, X.S. ( Shanghai Jiaotong Univ. (China) )
Chen, W.Y.
Zhang, W.P.

Publication title:

MEMS/MOEMS Technologies and Applications

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4928

Pub. Year:

2002

Page(from):

113

Page(to):

117

Pages:

5

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819447173 [081944717X]

Language:

English

Call no.:

P63600/4928

Type:

Conference Proceedings

Details

TDL ID:	ZA00012777
Series ID:	PA00000029
Conf. info. (Name):	Photonics Asia : MEMS/MOEMS technologies and applications
Conf. info. (Number):	2002
Conf. info. (Venue):	Shanghai, China
Conf. info. (Date):	2002.10.17-2002.10.18

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