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Fabrication of reflective micromirror in micromechanical optical switches

Author(s):
Dong, W. ( Jilin Univ. (China) )
Chen, W.Y.
Yang, H.
Zhang, L.
Ji, P.
Guo, W.B.
Liu, C.X.
Zhang, X.D.
Sun, D.M.
Jia, C.P.
Pan, J.X.
6 more
Publication title:
MEMS/MOEMS Technologies and Applications
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4928
Pub. Year:
2002
Page(from):
103
Page(to):
107
Pages:
5
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819447173 [081944717X]
Language:
English
Call no.:
P63600/4928
Type:
Conference Proceedings

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