Excimer laser micromachining technology in biochip
- Author(s):
Chen, T. ( Beijing Polytechnic Univ. (China) ) Chen, J.M. Zhang, Y. Ying, B.H. Jing, T. Zuo, T.C. - Publication title:
- MEMS/MOEMS Technologies and Applications
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4928
- Pub. Year:
- 2002
- Page(from):
- 98
- Page(to):
- 102
- Pages:
- 5
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819447173 [081944717X]
- Language:
- English
- Call no.:
- P63600/4928
- Type:
- Conference Proceedings
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