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Excimer laser micromachining technology in biochip

Author(s):
Chen, T. ( Beijing Polytechnic Univ. (China) )
Chen, J.M.
Zhang, Y.
Ying, B.H.
Jing, T.
Zuo, T.C.
1 more
Publication title:
MEMS/MOEMS Technologies and Applications
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4928
Pub. date:
2002
Page(from):
98
Page(to):
102
Pages:
5
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819447173 [081944717X]
Language:
English
Call no.:
P63600/4928
Type:
Conference Proceedings

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