Fabrication of 1.3-μm Si-based MEMS tunable optical filter

Fabrication of 1.3-μm Si-based MEMS tunable optical filter

Author(s):

Zuo, Y.H. ( Institute of Semiconductors (China) )

Publication title:

MEMS/MOEMS Technologies and Applications

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4928

Pub. Year:

2002

Page(from):

73

Page(to):

76

Pages:

4

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819447173 [081944717X]

Language:

English

Call no.:

P63600/4928

Type:

Conference Proceedings

Details

TDL ID:	ZA00012777
Series ID:	PA00000029
Conf. info. (Name):	Photonics Asia : MEMS/MOEMS technologies and applications
Conf. info. (Number):	2002
Conf. info. (Venue):	Shanghai, China
Conf. info. (Date):	2002.10.17-2002.10.18

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