Polar-coordinate laser writer: analysis of exposure dose distribution
- Author(s):
- Xie, Y.J. ( Changchun Institute of Optics, Fine Mechanics and Physics (China) )
- Lu, Z.W.
- Li, F.Y.
- Weng, Z.C.
- Publication title:
- Optical design and testing : 15-18 October 2002, Shanghai, China
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4927
- Pub. Year:
- 2002
- Page(from):
- 381
- Page(to):
- 384
- Pages:
- 4
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819447166 [0819447161]
- Language:
- English
- Call no.:
- P63600/4927
- Type:
- Conference Proceedings
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