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Polar-coordinate laser writer: analysis of exposure dose distribution

Author(s):
Publication title:
Optical design and testing : 15-18 October 2002, Shanghai, China
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4927
Pub. date:
2002
Page(from):
381
Page(to):
384
Pages:
4
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819447166 [0819447161]
Language:
English
Call no.:
P63600/4927
Type:
Conference Proceedings

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