Simulation of optical lithography proces for fabricating diffractive optics
- Author(s):
- Publication title:
- Holography, diffractive optics, and applications : 15-17 October 2002, Shanghai, China
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4924
- Pub. Year:
- 2002
- Page(from):
- 221
- Page(to):
- 227
- Pages:
- 7
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819447135 [0819447137]
- Language:
- English
- Call no.:
- P63600/4924
- Type:
- Conference Proceedings
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