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Simulation of optical lithography proces for fabricating diffractive optics

Author(s):
Publication title:
Holography, diffractive optics, and applications : 15-17 October 2002, Shanghai, China
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4924
Pub. Year:
2002
Page(from):
221
Page(to):
227
Pages:
7
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819447135 [0819447137]
Language:
English
Call no.:
P63600/4924
Type:
Conference Proceedings

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