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Synthesis of thin diamond films on Si substrate by the means of near-surface glow discharge CVD

Author(s):
Publication title:
Advanced materials and devices for sensing and imaging : 17-18 October 2002, Shanghai, China
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4919
Pub. Year:
2002
Page(from):
328
Page(to):
331
Pages:
4
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819447081 [0819447080]
Language:
English
Call no.:
P63600/4919
Type:
Conference Proceedings

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