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Nanocrystalline SiC films deposited at low temperature using hot filament chemical vapor deposition

Author(s):
Publication title:
Materials, Devices, and Systems for Display and Lighting
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4918
Pub. Year:
2002
Page(from):
227
Page(to):
230
Pages:
4
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819447074 [0819447072]
Language:
English
Call no.:
P63600/4918
Type:
Conference Proceedings

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