Temperature effect on the characteristics of DC magnetron-sputtered ITO films

Temperature effect on the characteristics of DC magnetron-sputtered ITO films

Author(s):

Hsu, C.-0M. ( Southern Taiwan Univ. of Technology )
Lee, J.-W.
Chen, J.-S.
Huang, C.-Y. ( MOS Technology Inc. (Taiwan China) )
Lin, J.-C.

Publication title:

Materials, Devices, and Systems for Display and Lighting

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4918

Pub. Year:

2002

Page(from):

135

Page(to):

143

Pages:

9

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819447074 [0819447072]

Language:

English

Call no.:

P63600/4918

Type:

Conference Proceedings

Details

TDL ID:	ZA00012767
Series ID:	PA00000029
Conf. info. (Name):	Photonics Asia : Materials, devices, and systems for display and lighting
Conf. info. (Number):	2002
Conf. info. (Venue):	Shanghai, China
Conf. info. (Date):	2002.10.15-2002.10.17

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