Fabrication of silica-on-silicon waveguide devices by PECVD

Fabrication of silica-on-silicon waveguide devices by PECVD

Author(s):

Lin, S.F. ( Luminent Inc. (Taiwan) )

Hou, J.P.

Chiu, C.H.

Lin, J.Y.

Chu, T.C. ( National Taiwan Univ. (Taiwan China) )

Tsai, D.P.

Chu, A.K. ( National Sun Yat-Sen Univ. (Taiwan China) )

2 more

Publication title:

Optical fiber and planar waveguide technology II : APOC 2002 : Asia-Pacific Optical and Wireless Communications : 16-18 October 2002, Shanghai, China

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4904

Pub. Year:

2002

Page(from):

338

Page(to):

344

Pages:

7

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819446930 [0819446939]

Language:

English

Call no.:

P63600/4904

Type:

Conference Proceedings

Details

TDL ID:	ZA00012753
Series ID:	PA00000029
Conf. info. (Name):	APOC : Asia Communications and Photonics
Conf. info. (Number):	2002
Conf. info. (Venue):	Shanghai, China
Conf. info. (Date):	2002.10.16-2002.10.18

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