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Optical tomography using confocal fan-beam illumination and its application to LCD panel inspection

Author(s):
Publication title:
Optomechatronic systems III : 12-14 November 2002, Stuttgart, Germany
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4902
Pub. date:
2002
Page(from):
182
Page(to):
188
Pages:
7
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819446893 [0819446890]
Language:
English
Call no.:
P63600/4902
Type:
Conference Proceedings

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