The vortex mask: making 80-nm contacts with a twist!
- Author(s):
- Levenson, M.D. ( M.D. Levenson Consulting (USA) )
- Dai, G. ( Sigma-C Inc. (USA) )
- Ebihara, T. ( Canon USA, Inc. (USA) )
- Publication title:
- 22nd Annual BACUS Symposium on Photomask Technology
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4889
- Pub. Year:
- 2002
- Vol.:
- Part Two
- Page(from):
- 1293
- Page(to):
- 1303
- Pages:
- 11
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819446756 [0819446750]
- Language:
- English
- Call no.:
- P63600/4889
- Type:
- Conference Proceedings
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