Blank Cover Image

Analytical approach to X-phenomenon in alternating phase-shifting masks

Author(s):
Park, J.R. ( Samsung Electronics Co., Ltd. (South Korea) )
Kim, S.-H.
Lee, H.-J.
Jang, I.-Y.
Choi, Y.-H.
Yang, S.-H.
Lee, Y.-H.
Kim, Y.-H.
Choi, S.-W.
Yoon, H.-S.
Sohn, J.-M.
6 more
Publication title:
22nd Annual BACUS Symposium on Photomask Technology
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4889
Pub. date:
2002
Vol.:
Part Two
Page(from):
1209
Page(to):
1216
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819446756 [0819446750]
Language:
English
Call no.:
P63600/4889
Type:
Conference Proceedings

Similar Items:

Lee,S.-W., Shin,I.-G., Kim,Y.-H., Choi,S.-W., Han,W.-S., Yoon,H.-S., Sohn,J.-M.

SPIE-The International Society for Optical Engineering

Cha,H.-S., Choi,S.-J., Yoon,S.-Y., Jung,S.-M., Choi,S.-S., Jeong,S.-H.

SPIE-The International Society for Optical Engineering

Choi, Y.-H., Park, J.R., Sung, M.-G., Yang, S.-H., Kim, S.-H., Lee, H.-J., Lee, J.-Y., Jang, I.Y., Kim, Y.H., Choi, …

SPIE-The International Society for Optical Engineering

Kim, Y. -H., Park, J. -H., Lee, K. -H., Choi, S. -W., Yoon, H. -S., Sohn, J. -M.

SPIE - The International Society of Optical Engineering

Shin,I.-G., Lee,S.-W., Kim,Y.-H., Choi,S.-W., Han,W.-S., Sohn,J.-M., Lim,T.-K.

SPIE-The International Society for Optical Engineering

Choi, S.-J., Cha, H.-S., Yoon, S.-Y., Kim, Y.-D., Lee, D.-H., Kim, J.-M., Kim, J.-S., Min, D.-S., Jang, P.-J., Chang, …

SPIE-The International Society for Optical Engineering

Lee,S.-W., Chung,D.-H., Shin,I.-G., Kim,Y.-H., Choi,S.-W., Han,W.-S., Sohn,J.-M.

SPIE-The International Society for Optical Engineering

Yoon,S.-Y., Cha,H.-S., Choi,S.-J., Jung,S.-M., Choi,S.-S., Jeong,S.-H.

SPIE-The International Society for Optical Engineering

Yang, S.-H., Choi, Y.-H., Park, J.-R., Kim, Y.-H., Choi, S.-W., Yoon, H.-S., Sohn, J.-M.

SPIE-The International Society for Optical Engineering

Lee, H., Yang, S.-H., Park, J.-H., Moon, S.-Y., Choi, S.-W., Sohn, J.-M.

SPIE - The International Society of Optical Engineering

Kang, M.-A., Kim, S.-H., Shin, I.-K., Choi, S.-W., Sohn, J.-M.

SPIE-The International Society for Optical Engineering

S.-G. Kim, S.-G. Woo, W.-S. Han, Y.-B. Koh, M.-Y. Lee

Society of Photo-optical Instrumentation Engineers

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12