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Application of chromeless phase lithography (CPL) masks in ArF lithography

Author(s):
Kasprowicz, B.S. ( Photronics Inc. (USA) )
Progler, C.J.
Wu, W. ( Motorola, Inc. (USA) )
Conley, W.
Litt, L.C.
Van Den Broeke, D.J. ( ASML Masktools Inc. (USA) )
Wampler, K.E.
Socha, R.J. ( ASML (USA) )
3 more
Publication title:
22nd Annual BACUS Symposium on Photomask Technology
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4889
Pub. Year:
2002
Vol.:
Part Two
Page(from):
1189
Page(to):
1201
Pages:
13
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819446756 [0819446750]
Language:
English
Call no.:
P63600/4889
Type:
Conference Proceedings

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