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Defect printability analysis on alternating phase-shifting masks for 193-nm lithography

Author(s):
Morikawa, Y. ( Dai Nippon Printing Co., Ltd. (Japan) )
Totsu, Y.
Nishiguchi, M.
Hoga, M.
Hayashi, N.
Pang, L. ( Numeical Technologies, Inc. (USA) )
Luk-Pat, G.T.
2 more
Publication title:
22nd Annual BACUS Symposium on Photomask Technology
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4889
Pub. Year:
2002
Vol.:
Part Two
Page(from):
922
Page(to):
934
Pages:
13
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819446756 [0819446750]
Language:
English
Call no.:
P63600/4889
Type:
Conference Proceedings

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