Performance of proximity gap suction development (PGSD)

Performance of proximity gap suction development (PGSD)

Author(s):

Sakurai, H. ( Toshiba Corp. (Japan) )

Itoh, M.

Esaki, Y. ( Tokyo Electron Kyushu Ltd. (Japan) )

Ooishi, K.

Sakamoto, K.

Nakao, M. ( Dai Nippon Printing Co., Ltd. (Japan) )

Publication title:

22nd Annual BACUS Symposium on Photomask Technology

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4889

Pub. Year:

2002

Vol.:

Part One

Page(from):

737

Page(to):

745

Pages:

9

Pub. info.:

Bellingham, WA: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819446756 [0819446750]

Language:

English

Call no.:

P63600/4889

Type:

Conference Proceedings

Details

TDL ID:	ZA00012736
Series ID:	PA00000029
Conf. info. (Name):	SPIE Photomask Technology : Annual BACUS Symposium on Photomask Technology
Conf. info. (Number):	2002 : 22nd
Conf. info. (Venue):	Monterey, California, USA
Conf. info. (Date):	2002.10.011-2002.10.04

Similar Items:

1 Conference Proceedings Application of PGSD (proximity gap suction development) to 70 nm NAND mask fabrication Sakurai, H., Shibata, T., Itoh, M., Ooishi, K., Funakoshi, H., Okamoto, Y., Oono, S., Kaneda, M., Kamei, S., Hayashi, N. SPIE - The International Society of Optical Engineering	7 Conference Proceedings Development of the falftone phase-shift mask for DUV exposure Mikami,K., Mohri,H., Itoh,N., Miyashita,H., Hayashi,N., Sano,H. SPIE-The International Society for Optical Engineering
2 Conference Proceedings New development method eliminating the loading and microloading effect Ooishi, K., Esaki, Y., Sakamoto, K., Sakurai, H., Itoh, M., Nakao, M., Nishimura, T., Miyashita, H., Hayashi, N., … SPIE-The International Society for Optical Engineering	8 Conference Proceedings Subaru Telescope: current performances and future upgrade plans Usuda, T., Takato, N., Morino, J.-I., Kosugi, G., Miyashita, A., Noumaru, J., Kanzawa, T., Hayashi, S.S., Letawsky, M., … SPIE-The International Society for Optical Engineering
3 Conference Proceedings More evolved PGSD (proximity gap suction developer) for controlling movement of dissolution products [6349-175] Sakurai, H., Oppata, Y., Murano, K., Sakai, M., Itoh, M., Watanabe, H., Funakoshi, H., Ooishi, K., Okamoto, Y., Kaneda, … SPIE - The International Society of Optical Engineering	9 Conference Proceedings Subaru Telescope: current performances and future upgrade plans Usuda, T., Takato, N., Kanzawa, T., Miyashita, A., Uraguchi, F., Kurakami, T., Kosugi, G., Hayashi, S. S., Akiyama, M., … SPIE - The International Society of Optical Engineering
4 Conference Proceedings Novel resist development system for photomasks Itoh, M., Sakurai, H., Esaki, Y., Ooishi, K., Sakamoto, K. SPIE-The International Society for Optical Engineering	10 Conference Proceedings Development and evaluation of chromium-based attenuated phase-shift masks for DUV exposure K. Mikami, H. Mohri, H. Miyashita, N. Hayashi, H. Sano Society of Photo-optical Instrumentation Engineers
5 Conference Proceedings Study of second-generation Proximity Gap Suction Development System (PGSD-II) for mask fabrication H. Sakurai, M. Terayama, M. Sakai, M. Itoh, O. Ikenaga Society of Photo-optical Instrumentation Engineers	11 Conference Proceedings Band Alignment at CdS/Wide-Band-Gap Cu(In,Ga)Se2 Hetero-Junction by Using PES/IPES Kong, S. H., Kashiwabara, H., Ohki, K., Itoh, K., Okuda, T., Niki, S., Sakurai, K., Yamada, A., Ishizuka, S., Terada, N. Materials Research Society
6 Conference Proceedings Investigations on microloading effect: a parallel approach to PGSD (proximity gap suction development) Courboin, D., Choi, J.W., Jung, S.H., Baek, S.H., Kim, L.-J., Ahn, C.N., Kim, H.-S. SPIE - The International Society of Optical Engineering	12 Conference Proceedings Development of focused-ion-beam repair for quartz defects on alternating phase-shift masks Matsumoto,M., Abe,T., Yokoyama,T., Miyashita,H., Hayashi,N., Sano,H. SPIE-The International Society for Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12