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Comparative evaluation of mask production CAR development processes with stepwise defect inspection

Author(s):
Jeong, W.-G. ( Photronics-PKL (South Korea) )
Lee, J.-K.
Park, D.I.
Park, E.-S.
Lee, J.-H.
Seo, S.-K.
Lee, D.-H.
Kim, J.-M.
Choi, S.S.
Jeong, S.H.
5 more
Publication title:
22nd Annual BACUS Symposium on Photomask Technology
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4889
Pub. date:
2002
Vol.:
Part One
Page(from):
626
Page(to):
633
Pages:
8
Pub. info.:
Bellingham, WA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819446756 [0819446750]
Language:
English
Call no.:
P63600/4889
Type:
Conference Proceedings

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