MARS2: an advanced femtosecond laser mask repair tool

MARS2: an advanced femtosecond laser mask repair tool

Author(s):

Wagner, A. ( IBM Thomas J. Watson Research Ctr. (USA) )
Haight, R.A.
Longo, P.

Publication title:

22nd Annual BACUS Symposium on Photomask Technology

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4889

Pub. Year:

2002

Vol.:

Part One

Page(from):

457

Page(to):

468

Pages:

12

Pub. info.:

Bellingham, WA: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819446756 [0819446750]

Language:

English

Call no.:

P63600/4889

Type:

Conference Proceedings

Details

TDL ID:	ZA00012736
Series ID:	PA00000029
Conf. info. (Name):	SPIE Photomask Technology : Annual BACUS Symposium on Photomask Technology
Conf. info. (Number):	2002 : 22nd
Conf. info. (Venue):	Monterey, California, USA
Conf. info. (Date):	2002.10.011-2002.10.04

Similar Items:

1 Conference Proceedings Implementation and performance of a femtosecond laser mask repair system in manufacturing Haight,R.A., Hayden,D., Longo,P., Neary,T.E., Wagner,A. SPIE - The International Society for Optical Engineering	7 Conference Proceedings Advanced data mining tools for exploring large astronomical databases Longo,G., Tagliaferri,R., Sessa,S., Ortiz,P., Capaccioli,M., Ciaramella,A., Donalek,C., Raiconi,G., Staiano,A., … SPIE-The International Society for Optical Engineering
2 Conference Proceedings Femtosecond laser ablation and deposition of metal films on transparent substrates with applications in photomask repair (invited Paper) Haight, R., Wagner, A., Longo, P., Lim, D. SPIE - The International Society of Optical Engineering	8 Conference Proceedings High-resolution near-field mask repair with femtosecond laser Shani,Y., Melnick,I., Yoffe,S., Sharon,Y., Lieberman,K.S., Terkel,H. SPIE - The International Society for Optical Engineering
3 Conference Proceedings Photomask repair using an advanced laser-based repair system (MARS2) Schmidt, M.R., Flanigan, P., Thibault, D. SPIE-The International Society for Optical Engineering	9 Conference Proceedings Advanced FIB mask repair technology in ArF lithography Hiruta,K., Kubo,S., Morimoto,H., Yasaka,A., Hagiwara,R., Adachi,T., Morikawa,Y., Iwase,K., Hayashi,N. SPIE - The International Society for Optical Engineering
4 Conference Proceedings Advanced femtosecond DUV laser mask repair tool for large area photomasks [6349-172] Treyger, L., Heyl, J., Fink, M., Koren, I., Li, Y., Ronning, D., Small, F., Xian, B. SPIE - The International Society of Optical Engineering	10 Conference Proceedings Advanced FIB mask repair technology for ArF lithography: ？ Kubo,S., Hiruta,K., Morimoto,H., Yasaka,A., Hagiwara,R., Adachi,T., Morikawa,Y., Iwase,K., Hayashi,N. SPIE-The International Society for Optical Engineering
5 Conference Proceedings Spatial data reduction for laser vibrometry using advanced regressive Fourier series J. Vanherzeele, R. Longo, S. Vanlanduit, P. Guillaume Society of Photo-optical Instrumentation Engineers	11 Conference Proceedings Advanced FIB mask repair technology for ArF lithography: ？ Hagiwara,R., Yasaka,A., Takaoka,O., Kozakai,T., Yabe,S., Koyama,Y., Muramatsu,M., Doi,T., Suzuki,K., Okabe,M., Aita,K., … SPIE-The International Society for Optical Engineering
6 Conference Proceedings SUPERCRITICAL FLUID APPLICATIONS IN ADVANCED MATERIALS PROCESSING Wagner, R.A., Krukonis, V.J., Coffey, M.P. Materials Research Society	12 Conference Proceedings Advanced tools,multiple missions,flexible organizations,and education Lucas,R.A., Koratkar,A. SPIE - The International Society for Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12