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Integration of antireflection coatings on EUV absorber stacks

Author(s):
Wasson, J.R. ( Motorola, Inc. (USA) )
Han, S.-I.
Edwards, N.V.
Weisbrod, E.
Dauksher, W.J.
Mangat, P.J.S.
Pettibone, D.W. ( KLA-Tencor Corp. (USA) )
2 more
Publication title:
22nd Annual BACUS Symposium on Photomask Technology
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4889
Pub. Year:
2002
Vol.:
Part One
Page(from):
382
Page(to):
388
Pages:
7
Pub. info.:
Bellingham, WA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819446756 [0819446750]
Language:
English
Call no.:
P63600/4889
Type:
Conference Proceedings

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