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Optical characterization of high-k dielectrics HfO2 thin films obtained by MOCVD

Author(s):
Modreanu, M. ( National Microelectronics Research Ctr. (Ireland) )
Hurley, P.K.
O'Sullivan, B.J.
O'Looney, B.
Senateur, J.-P. ( Institut National Polytechnique de Grenoble (France) )
Rousell, H.
Rousell, F.
Audier, M.
Dubourdieu, C.
Boyd, I.W. ( Univ. College London (United Kingdom) )
Fang, Q.
Leedham, T.L. ( Inorgtech, Ltd (United Kingdom) )
Rushworth, S.A.
Jones, A.C.
Davies, H.O.
Jimenez, C. ( JIPElec (France) )
11 more
Publication title:
Opto-Ireland 2002: Optics and Photonics Technologies and Applications
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4876
Pub. Year:
2003
Vol.:
Part Two
Page(from):
1236
Page(to):
1246
Pages:
11
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819446572 [0819446572]
Language:
English
Call no.:
P63600/4876
Type:
Conference Proceedings

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