Analysis of material properties for MEMS using interferometric measurements

Analysis of material properties for MEMS using interferometric measurements

Author(s):

O'Mahony, C. ( National Microelectronics Research Ctr. (Ireland) )
Hill, M. ( Cork Institute of Technology (Ireland) )
Mathewson, A. ( National Microelectronics Research Ctr. (Ireland) )

Publication title:

Opto-Ireland 2002: Optics and Photonics Technologies and Applications

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4876

Pub. Year:

2003

Vol.:

Part Two

Page(from):

712

Page(to):

722

Pages:

11

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819446572 [0819446572]

Language:

English

Call no.:

P63600/4876

Type:

Conference Proceedings

Details

TDL ID:	ZA00012723
Series ID:	PA00000029
Conf. info. (Name):	Opto-Ireland
Conf. info. (Number):	2002
Conf. info. (Venue):	Galway, Ireland
Conf. info. (Date):	2002.09.05-2002.09.06

Similar Items:

1 Conference Proceedings In-Situ Probing of Atomic Layer Deposition Processes using Infrared and Near Infrared Spectroscopy A. O'Mahony, I.M. Povey, M.E. Pemble Electrochemical Society	7 Conference Proceedings III-V Solar Cells Based on a Lattice Parameter near that of InP D. O'Mahony, I. Mathews, A. Gocalinska ESA Communications
2 Conference Proceedings STRUCTURAL PROPERTIES OF COLLOIDAL Co NANOPARTICLES Pedreschi, F., O'Mahony, J.D., Flipse, C.F.J. Kluwer Academic Publishers	8 Conference Proceedings Multifunctional interferometric platform for on-chip testing of the micromechanical properties of MEMS/MOEMS Gorecki, C., Jozwik, M., Salbut, L.A. SPIE - The International Society of Optical Engineering
3 Conference Proceedings A Comparison between the Tribological and Mechanical Properties of TiN and TiCN Donnelly, N., McConnell, M., Dowling, D. P., O'Mahony, J. D. Trans Tech Publications	9 Conference Proceedings INTERFEROMETRIC MEASUREMENTS OF SURFACE PROPERTIES DURING LASER ANNEALING Bertolotti,m M., Ferrari, A., Sibilia, C., Jani, P. North-Holland
4 Conference Proceedings Atoms in External Fields O'Mahony F P Plenum Press	10 Conference Proceedings (522d) Development and Implementation of a Mathematical Model As a Key Component of a Palladium Control Strategy for a Semi-Continuous Process to Produce a … Kevin Seibert, Carla Luciani, Colm O'Mahony American Institute of Chemical Engineers
5 Conference Proceedings Optical packet switch architechtures for ultrahigh-speed networks (Invited Paper) [6021-02] O’Mahony M. J., Klonidis D., Politi C., Negabati R., Simeonidou D. SPIE - The International Society of Optical Engineering	11 Conference Proceedings (522d) Development and Implementation of a Mathematical Model As a Key Component of a Palladium Control Strategy for a Semi-Continuous Process to Produce a … Kevin Seibert, Carla Luciani, Colm O'Mahony American Institute of Chemical Engineers
6 Conference Proceedings User Requirements for SAR Data in the Coastal and Marine Environment C. O'Mahony, V. Cummins, N. Dwyer, J. A. Johannessen ESA Publications Division	12 Conference Proceedings (522d) Development and Implementation of a Mathematical Model As a Key Component of a Palladium Control Strategy for a Semi-Continuous Process to Produce a … Kevin Seibert, Carla Luciani, Colm O'Mahony American Institute of Chemical Engineers

1

2

3

4

5

6

7

8

9

10

11

12