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UV laser micromachining of silicon, indium phosphide, and lithium niobate for telecommunications applications

Author(s):
Publication title:
Opto-Ireland 2002: Optics and Photonics Technologies and Applications
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4876
Pub. Year:
2003
Vol.:
Part One
Page(from):
479
Page(to):
486
Pages:
8
Pub. info.:
Belliengham, WA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819446572 [0819446572]
Language:
English
Call no.:
P63600/4876
Type:
Conference Proceedings

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