Performance modeling of optical metrology systems

Performance modeling of optical metrology systems

Author(s):

Dutta, K. ( Lockheed Martin Advanced Technology Ctr.(USA) )
Benson, R.S.

Publication title:

Interferometry in Space

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4852

Pub. Year:

2003

Vol.:

Part Two

Page(from):

839

Page(to):

848

Pages:

10

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819446312 [0819446319]

Language:

English

Call no.:

P63600/4852

Type:

Conference Proceedings

Details

TDL ID:	ZA00012697
Series ID:	PA00000029
Conf. info. (Name):	Astronomical Telescopes and Instrumentation : Interferometry in Space
Conf. info. (Number):	2002
Conf. info. (Venue):	Waikoloa, HI, USA
Conf. info. (Date):	2002.08.26-2002.08.28

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