Source modeling and calculation of mask illumination during extreme-ultraviolet lithography condenser design
- Author(s):
- Laughlin, L. ( Optical Sciences Ctr./Univ. of Arizona (USA) )
- Sasian, J.M.
- Publication title:
- International optical design conference 2002 : 3-5 June, 2002, Tucson, Arizona, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4832
- Pub. Year:
- 2002
- Page(from):
- 283
- Page(to):
- 292
- Pages:
- 10
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819446084 [0819446084]
- Language:
- English
- Call no.:
- P63600/4832
- Type:
- Conference Proceedings
Similar Items:
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
2
Conference Proceedings
High-power source and illumination system for extreme ultraviolet lithography
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
9
Conference Proceedings
Process for improved reflectivity uniformity in extreme-ultraviolet lithography (EUVL) masks
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
10
Conference Proceedings
Mask substrate requirements and development for extreme ultraviolet lithography(EUVL)
SPIE - The International Society for Optical Engineering |
5
Conference Proceedings
Status of fabrication of square-format masks for extreme-ultraviolet lithography (EUVL) at the MCoC
SPIE-The International Society for Optical Engineering |
11
Conference Proceedings
Point cleaning of mask blanks for extreme ultraviolet lithography [6349-94]
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |