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Overview of optical systems for 30-nm-resolution lithography at EUV wavelenghts (Invited Paper)

Author(s):
Hudyma, R.M. ( Paragon Optics, Inc. (USA) )  
Publication title:
International optical design conference 2002 : 3-5 June, 2002, Tucson, Arizona, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4832
Pub. Year:
2002
Page(from):
137
Page(to):
148
Pages:
12
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819446084 [0819446084]
Language:
English
Call no.:
P63600/4832
Type:
Conference Proceedings

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