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Femtosecond laser ablation of copper

Author(s):
  • Goh, Y.-W. ( Data Storage Institute/National Univ. of Singapore (Singapore) )
  • Lu, Y.F. ( Data Storage Institute/National Univ. of Singapore (Singapore) )
  • Hong, M.-H. ( Data Storage Institute/National Univ. of Singapore (Singapore) )
  • Chong, T.C. ( Data Storage Institute/National Univ. of Singapore (Singapore) )
Publication title:
Third International Symposium on Laser Precision Microfabrication : proceedings : 27-31 May, 2002, Osaka, Japan
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4830
Pub. Year:
2003
Page(from):
442
Page(to):
446
Pages:
5
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819446015 [0819446017]
Language:
English
Call no.:
P63600/4830
Type:
Conference Proceedings

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