Laser-induced plasma-assisted ablation and its applications
- Author(s):
Hong, M.H. ( Data Storage Institute/National Univ. of Singapore (Singapore) ) Sugioka, K. ( The Institute of Physical and Chemical Research (RIKEN) (Japan) ) Wu, D.J. ( Data Storage Institute/National Univ. of Singapore (Singapore) ) Chew, K.J. Lu, Y.F. Midorikawa, K. ( The Institute of Physical and Chemical Research (RIKEN) (Japan) ) Chong, T.C. ( Data Sotrage Institute/National Univ. of Singapore (Singapore) ) - Publication title:
- Third International Symposium on Laser Precision Microfabrication : proceedings : 27-31 May, 2002, Osaka, Japan
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4830
- Pub. Year:
- 2003
- Page(from):
- 408
- Page(to):
- 413
- Pages:
- 6
- Pub. info.:
- Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819446015 [0819446017]
- Language:
- English
- Call no.:
- P63600/4830
- Type:
- Conference Proceedings
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