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Laser-induced plasma-assisted ablation and its applications

Author(s):
Hong, M.H. ( Data Storage Institute/National Univ. of Singapore (Singapore) )
Sugioka, K. ( The Institute of Physical and Chemical Research (RIKEN) (Japan) )
Wu, D.J. ( Data Storage Institute/National Univ. of Singapore (Singapore) )
Chew, K.J.
Lu, Y.F.
Midorikawa, K. ( The Institute of Physical and Chemical Research (RIKEN) (Japan) )
Chong, T.C. ( Data Sotrage Institute/National Univ. of Singapore (Singapore) )
2 more
Publication title:
Third International Symposium on Laser Precision Microfabrication : proceedings : 27-31 May, 2002, Osaka, Japan
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4830
Pub. date:
2003
Page(from):
408
Page(to):
413
Pages:
6
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819446015 [0819446017]
Language:
English
Call no.:
P63600/4830
Type:
Conference Proceedings

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