Toward nanoprocess applications with laser-cooled silicon atoms

Toward nanoprocess applications with laser-cooled silicon atoms

Author(s):

Kumagai, H. ( The Institute of physical and Chemical Research (RIKEN) (Japan) )
Asakawa, Y. ( The Institute of Physical and Chemical Research (RIKEN) (Japan) )
Midorikawa, K. ( The Institute of Physical and Chemical Research (RIKEN) (Japan) )
Obara, M. ( Keio Univ. (Japan) )

Publication title:

Third International Symposium on Laser Precision Microfabrication : proceedings : 27-31 May, 2002, Osaka, Japan

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4830

Pub. Year:

2003

Page(from):

218

Page(to):

221

Pages:

4

Pub. info.:

Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819446015 [0819446017]

Language:

English

Call no.:

P63600/4830

Type:

Conference Proceedings

Details

TDL ID:	ZA00012667
Series ID:	PA00000029
Conf. info. (Name):	International Symposium on Laser Precision Microfabrication
Conf. info. (Number):	2002 : 3rd
Conf. info. (Venue):	Osaka, Japan
Conf. info. (Date):	2002.05.27-2002.05.31

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