Laser-assisted chemical vapor deposition of carbon for the growth of high-aspect-ratio microrods and direct writing of surface patterns

Laser-assisted chemical vapor deposition of carbon for the growth of high-aspect-ratio microrods and direct writing of surface patterns

Author(s):

Jeong, S. ( Kwangju Institute of Science and Technology (South Korea) )
Kim, J.
Kim, S.
Lee, D.

Publication title:

Third International Symposium on Laser Precision Microfabrication : proceedings : 27-31 May, 2002, Osaka, Japan

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4830

Pub. Year:

2003

Page(from):

177

Page(to):

181

Pages:

5

Pub. info.:

Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819446015 [0819446017]

Language:

English

Call no.:

P63600/4830

Type:

Conference Proceedings

Details

TDL ID:	ZA00012667
Series ID:	PA00000029
Conf. info. (Name):	International Symposium on Laser Precision Microfabrication
Conf. info. (Number):	2002 : 3rd
Conf. info. (Venue):	Osaka, Japan
Conf. info. (Date):	2002.05.27-2002.05.31

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