Water-jet-guided laser processing

Water-jet-guided laser processing

Author(s):

Richerzhagen, B. ( Synova SA (Switzerland) )
Kutsuna, M. ( Nagoya Univ. (Japan) )
Okada, H. ( Itochu Mechatronics Corp. (Japan) )
Ikeda, T. ( Fine Process Co. Ltd, (Japan) )

Publication title:

Third International Symposium on Laser Precision Microfabrication : proceedings : 27-31 May, 2002, Osaka, Japan

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4830

Pub. date:

2003

Page(from):

91

Page(to):

94

Pages:

4

Pub. info.:

Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819446015 [0819446017]

Language:

English

Call no.:

P63600/4830

Type:

Conference Proceedings

Details

TDL ID:	ZA00012667
Series ID:	PA00000029
Conf. info. (Name):	International Symposium on Laser Precision Microfabrication
Conf. info. (Number):	2002 : 3rd
Conf. info. (Venue):	Osaka, Japan
Conf. info. (Date):	2002.05.27-2002.05.31

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