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Diode laser sensor to monitor HCI in a plasma etch reactor

Author(s):
Kim, S. ( Stanford Univ. (USA) )
Klimecky, P. ( Univ. of Michigan (USA) )
Chou, S.-I. ( Stanford Univ. (USA) )
Jeffries, J.B.
Terry, F.L., Jr. ( Univ. of Michigan (USA) )
Hanson, R.K. ( Stanford Univ. (USA) )
1 more
Publication title:
Diode lasers and applications in atmospheric sensing : 10-11 July 2002, Seattle, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4817
Pub. Year:
2002
Page(from):
129
Page(to):
136
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819445858 [0819445851]
Language:
English
Call no.:
P63600/4817
Type:
Conference Proceedings

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