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High-speed noninterferometric nanotopographic characterization of Si wafer surfaces

Author(s):
Publication title:
Nanoscale Optics and Applications
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4809
Pub. date:
2002
Page(from):
208
Page(to):
216
Pages:
9
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819445773 [0819445770]
Language:
English
Call no.:
P63600/4809
Type:
Conference Proceedings

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