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Influence of photoresist feature geometry on ECR plasma-etched HgCdTe trenches

Author(s):
Benson, J.D. ( U.S. Army Night Vision & Electronic Sensors Directorate (USA) )
Stoltz, A.J., Jr.
Kaleczyc, A.W. ( E-OIR Measurements, Inc. (USA) )
Martinka, M. ( U.S. Army Night Vision & Electronic Sensors Directorate (USA) )
Almeida, L.A.
Boyd, P.R. ( Army Research Lab. (USA) )
Dinan, J.H. ( U.S. Army Night Vision & Electronic Sensors Directorate (USA) )
2 more
Publication title:
Materials for infrared detectors II : 8-9 July 2002 ,Seattle, Washington, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4795
Pub. date:
2002
Page(from):
129
Page(to):
135
Pages:
7
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819445629 [0819445622]
Language:
English
Call no.:
P63600/4795
Type:
Conference Proceedings

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