Recent advances in optical MEMS devices and systems (Invited Paper)
- Author(s):
- Patterson, P.R. ( Univ. of California/Los Angeles (USA) )
- Hah, D.
- Lee, M.M.C.
- Tsai, J.C.
- Wu, M.C.
- Publication title:
- Photonic Devices and Algorithms for Computing IV
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4788
- Pub. Year:
- 2002
- Page(from):
- 1
- Page(to):
- 8
- Pages:
- 8
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819445551 [081944555X]
- Language:
- English
- Call no.:
- P63600/4788
- Type:
- Conference Proceedings
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