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Recent advances in optical MEMS devices and systems (Invited Paper)

Author(s):
Publication title:
Photonic Devices and Algorithms for Computing IV
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4788
Pub. Year:
2002
Page(from):
1
Page(to):
8
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819445551 [081944555X]
Language:
English
Call no.:
P63600/4788
Type:
Conference Proceedings

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