Heat stability of Mo/Si multilayers inserted with silicon oxide layers
- Author(s):
- Ishino, M. ( Japan Atomic Energy Research Institute (Japan) )
- Yoda, O.
- Sano, K. ( Japan Atomic Energy Research Institute (Japan) )
- Koike, M. ( Japan Atomic Energy Research Institute (Japan) )
- Publication title:
- X-ray mirrors, crystals, and multilayers II : 10-11 July 2002, Seattle, Washington, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4782
- Pub. Year:
- 2002
- Page(from):
- 277
- Page(to):
- 284
- Pages:
- 8
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819445490 [0819445495]
- Language:
- English
- Call no.:
- P63600/4782
- Type:
- Conference Proceedings
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