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High-resolution carbon/carbon multilayers

Author(s):
Baranov, A.M. ( Research Institute of Vacuum Technique (Russia) )
Dietsch, R. ( Fraunhofer-Institut fuer Werkstoff-und Strahltechnik (Germany) )
Holz, T.
Menzel, M.
Weissbach, D.
Scholz, R. ( Max-Planck-Institut fuer Mikrostrukturphysik (Germany) )
Melov, V. ( Fraunhofer-Institut fuer Zerstoerungsfreie Pruefverfahren (Germany) )
Schreiber, J.
3 more
Publication title:
X-ray mirrors, crystals, and multilayers II : 10-11 July 2002, Seattle, Washington, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4782
Pub. Year:
2002
Page(from):
160
Page(to):
168
Pages:
9
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819445490 [0819445495]
Language:
English
Call no.:
P63600/4782
Type:
Conference Proceedings

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