Multidomain genetic algorithm (MDGA) and its applications to thin film metrology

Multidomain genetic algorithm (MDGA) and its applications to thin film metrology

Author(s):

Leng, J. ( Therma-Wave, Inc. (USA) )
Sidorowich, J.J.
Opsal, J.L.

Publication title:

Advanced characterization techniques for optical, semiconductor, and data storage components : 9-11 July 2002 Seattle, Washington, USA

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4779

Pub. Year:

2002

Page(from):

132

Page(to):

138

Pages:

7

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819445469 [0819445460]

Language:

English

Call no.:

P63600/4779

Type:

Conference Proceedings

Details

TDL ID:	ZA00012616
Series ID:	PA00000029
Conf. info. (Name):	Optics & Photonics : Advanced Characterization Techniques for Optical, Semiconductor, and Data Storage Components
Conf. info. (Number):	2002
Conf. info. (Venue):	Seattle, WA, USA
Conf. info. (Date):	2002.07.09-2002.07.11

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