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Optimal dynamic perfomance for high-precision actuators/stages

Author(s):
Publication title:
Optomechanical design and engineering 2002 : 7-9 August 2002, Seattle, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4771
Pub. Year:
2002
Page(from):
91
Page(to):
99
Pages:
9
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819445384 [081944538X]
Language:
English
Call no.:
P63600/4771
Type:
Conference Proceedings

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