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Simulation study of 193-nm phase-shifting masks: analysis of distributed aefectsof embeded attenuated phase mask (EAPSM)

Author(s):
Karklin, L. ( Numerical Technologies, Inc. (USA) )  
Publication title:
18th European Conference on Mask Technology for Integrated Circuits and Microcomponents
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4764
Pub. date:
2002
Page(from):
240
Page(to):
243
Pages:
4
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819445315 [0819445312]
Language:
English
Call no.:
P63600/4764
Type:
Conference Proceedings

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