Blank Cover Image

Printability of hard and soft defects in 193-nm lithography

Author(s):
Publication title:
18th European Conference on Mask Technology for Integrated Circuits and Microcomponents
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4764
Pub. date:
2002
Page(from):
95
Page(to):
111
Pages:
17
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819445315 [0819445312]
Language:
English
Call no.:
P63600/4764
Type:
Conference Proceedings

Similar Items:

Philipsen, V., Jonckheere, R.M., Kohlpoth, S., Torres, A.

SPIE-The International Society for Optical Engineering

Philipsen, V., Leunissen, L., De Ruyter, R., Jonckheere, R., Marlin, P., Wakefield, C., Johnson, S., Cangemi, M., …

SPIE - The International Society of Optical Engineering

Philipsen, V., Jonckheere, R.M.

SPIE-The International Society for Optical Engineering

Hourd, A.C., Grimshaw, A., Scheuring, G., Gittinger, C., Brueck, H.-J., Chen, S.-B., Chen, P.W., Hartmann, H., …

SPIE-The International Society for Optical Engineering

Philipsen, V., Jonckheere, R.M.

SPIE-The International Society for Optical Engineering

9 Conference Proceedings 193-nm lithography

Rothschild,M., Forte,A.R., Horn,M.W., Kunz,R.R., Palmateer,S.C., Sedlacek,J.H.C.

SPIE-The International Society for Optical Engineering

Driessen, F.A., van Adrichem, P., Philipsen, V., Jonckheere, R., Liu, H.-Y., Karklin, L.

SPIE-The International Society for Optical Engineering

Lin,C.-C., Kim,Y.-S., Kimmel,K.R.

SPIE-The International Society for Optical Engineering

Lucas,K.D., Word,J.C., Vandenberghe,G.N., Verhaegen,S., Jonckheere,R.M.

SPIE-The International Society for Optical Engineering

11 Conference Proceedings Printability of 2D mask quality

Philipsen, V., Jonckheere, R.

SPIE - The International Society of Optical Engineering

Jonckheere,R.M., Vandenberghe,G.N., Wiaux,V., Verhaegen,S., Ronse,K.

SPIE-The International Society for Optical Engineering

Schmid, R., Zibold, A. M., Bhattacharyya, K., Chen, X., Grenon, B. J.

SPIE - The International Society of Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12