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PREUVE and the EXULITE project: modular laser-produced plasma EUV source (Invited Paper)

Author(s):
Ceccotti, T. ( CEA Saclay (France) )
Chichmanian, F.
Descamps, D.
Haltebourg, P.
Hergott, J.-F.
Hulin, S.
Normand, D.
Segers, M.
Sublemontier, O.
Schmidt, M.
Cormont, Ph.
Neu, M.
Thro, P.Y.
Weulersse, J.M.
Barthod, B. ( Alcatel Vacuum Technology France (France) )
Bernard, R.
Veran, E.
Barbiche, J. ( Thales Laser (France) )
D'Aux, Ph.
Marquis, E.
15 more
Publication title:
High-Power Laser Ablation IV
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4760
Pub. Year:
2002
Vol.:
Part One
Page(from):
447
Page(to):
453
Pages:
7
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819445247 [081944524X]
Language:
English
Call no.:
P63600/4760
Type:
Conference Proceedings

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