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Pulsed-laser deposited TiC coatings for MEMS

Author(s):
Publication title:
High-Power Laser Ablation IV
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4760
Pub. Year:
2002
Vol.:
Part One
Page(from):
289
Page(to):
300
Pages:
12
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819445247 [081944524X]
Language:
English
Call no.:
P63600/4760
Type:
Conference Proceedings

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